Laboratory Facilities available at the Nano-Optics and Optoelectronics Research Lab
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Laboratory Facilities
Microfabrication Facility

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  • 300 m2 Cleanroom Facility (Class 1000 /100)
  • Equipment includes ALD, LPCVD, E-beam and UV lithography, FIB, RIE, Evaporators
  • Initial equipment funded by ATIC and specified by MIT Microsystems Technology Lab















Imaging and Analysis Lab

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  • Equipment includes SEM with EDS, TEM with Monochromator, EELS and Cs corrector, TEM/STEM with EDS
  • Characterization tools such as AFM, Spectrometers, Interferometric Microscope, Probe stations

















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